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Cleanroom Services

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PARC Cleanroom

Cleanroom Services

Design, Develop and Fabricate Novel Optoelectronic and Thin-Film Devices

A key PARC asset is our unique set of Cleanroom facilities which allow clients to develop novel prototype devices and technologies quickly and cost-effectively. We work closely with clients to develop new processes, build prototypes, and transition technology to manufacturing. 

  • Rapidly advance new projects from concept to production-ready
  • Work with next-generation materials
  • Create custom prototypes, even at low volumes
  • Compete effectively in a rapidly evolving market
  • Test, learn and iterate quickly and cost-effectively
  • Reduce risk and control costs while focusing on your core business

Optoelectronics Cleanroom and Resource Services

We have fully developed processes to design and fabricate a wide variety of active optoelectronic devices.  Our facilities support sponsored R&D and product development for clients to prototype novel optical sources and systems that are transferable to manufacturers.

Get Info - Optoelectronics Cleanroom

Custom Optoelectronics and III-V Semiconductor Processing Services:

  • Device/system design
  • Device process development
  • Proof-of-concept development
  • Prototype demonstration
  • Full system integration
  • Technology transfer

Device Expertise:

  • AlGalnN semiconductor materials
  • Novel heterostructures
  • Blue and UV LEDs
  • Blue-violet laser diodes
  • High-power UV-A laser diodes
  • Deep-UV lasers
  • VCSEL
  • VECSEL
  • Semiconductor optical amplifiers
  • Photodetectors
  • Novel growth strategies
  • Novel templates for epitaxy

Thin-Film and Novel Electronics Cleanroom Services

Our clients benefit from our expertise in working with semiconductor thin-film materials including amorphous silicon, metal oxides, low temperature poly-silicon and MEMS.  We have fully developed processes to design and fabricate a wide variety of active devices.

Our Cleanroom is one of the only facilities in the world that can work with clients to prototype display and imager thin-film transistor (TFT) backplanes, which are compatible with manufacturing facilities.

Get Info - Thin Film Cleanroom

Established Processes:

  • Thin-film transistor backplanes and displays
  • Thin-film transistor logic
  • Amorphous silicon photodiodes and image sensors
  • Flexible X-ray sensors
  • Stressed metal processing
  • High density flip chip interconnect
  • Stress engineered thin films
  • Micro spring fabrication and testing
  • Micro assembly
  • Micro assembler printer
  • Micro jet drug delivery
  • Processing on flexible substrates including thin polyimide

Unique Capabilities:

  • LPCVD
  • PECVD
  • Sputtering (PVD)
  • ALD
  • ITO deposition
  • Parylene coating
  • Laser recrystallization
  • Photolithographic patterning
  • Wet and dry etching
  • Deep RIE
  • CAIBE (dry etching technique)
  • Wafer bonding
  • Electroplating
  • Hydrogenation
  • SEM, AFM, High-resolution X-ray diffraction


Additional information (en)

Focus Areas

Our work is centered around a series of Focus Areas that we believe are the future of science and technology.

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Commercialization Opportunities

We’re continually developing new technologies, many of which are available for Commercialization.

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News

PARC scientists and staffers are active members and contributors to the science and technology communities.

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